The adoption of a High Power Optics irradiation system delivers high-resolution, high-speed, high-accuracy element analysis. The incorporation of the Gentle Beam enables top-surface imaging of a specimen at very low energies of several hundred eV. Semi-in-lens provides high-resolution observation and analysis High resolution observation and high spatial resolution analysis is achieved through the combination of a semi-in-lens type objective lens that can collimate the electron beam even at low accelerating voltages, and the in-lens Schottky electron source that provides a stable current over a long service life. Gentle Beam GB provides top-surface imaging with ultra-low energy incident electrons A Gentle Beam GB mode with better resolution than the normal mode is available. In GB mode a bias voltage is applied to the specimen while the electron beam is emitted, allowing top-surface imaging with only several hundred eV of incident electron, making it possible to obtain high resolution images of samples that have been difficult to observe until now.
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